Sains Malaysiana 47(10)(2018): 2565–2571
http://dx.doi.org/10.17576/jsm-2018-4710-33
Pengoptimuman Sensor
Resonans Plasmon Permukaan berdasarkan Kretschmann dengan
Kaedah Taguchi
(Optimization of Kretschmann
based on Surface Plasmon Resonance Sensor using Taguchi Method)
GAN SIEW
MEI,
NAJMIAH
RADIAH
BINTI MOHAMAD, NUR AKMAR
BINTI JAMIL, BURHANUDDIN YEOP
MAJLIS
& P. SUSTHITHA MENON*
Institute
of Microengineering and Nanoelectronics (IMEN), Universiti
Kebangsaan Malaysia, 43600 UKM Bangi, Selangor Darul Ehsan,
Malaysia
Received:
31 March 2018/Accepted: 27 June 2018
ABSTRACT
In this paper, Taguchi
experimental design technique was applied for optimization
of chromium (Cr)/silver (Ag)/indium tin oxide (ITO) SPR sensor
for operation in near infrared region. Four factors were considered
which include wavelength, thickness of Cr, thickness of Ag,
and thickness of ITO.
Finite-difference-time-domain (FDTD) method was used in numerical
analysis for minimum reflectance (Rmin)
and full-width-at-half-maximum (FWHM) performance parameters.
The results obtained from the Taguchi method shows that the
optimized parameter for Rmin was 785 nm of wavelength, Cr (1 nm), Ag (40 nm) and
ITO
(20 nm), whereas the optimized parameter for
FWHM was 785 of wavelength, Cr
(0 nm), Ag (40 nm) and ITO (0 nm). In short, the optimum parameters
for achieving the desired performance of sensor were successfully
predicted using Taguchi optimization method.
Keywords: Indium tin
oxide; Kretschmann configuration; silver; surface plasmon
resonance; Taguchi method
ABSTRAK
Dalam makalah ini, teknik
reka bentuk uji kaji Taguchi telah digunakan untuk mengoptimumkan
sensor SPR
kromium (Cr)/perak (Ag)/indium timah oksida
(ITO)
untuk operasi berhampiran gelombang inframerah. Empat faktor
yang dipilih termasuk panjang gelombang, ketebalan Cr, ketebalan
Ag dan ketebalan ITO.
Kaedah perbezaan-terhingga-domain-masa (FDTD) digunakan untuk analisis
berangka prestasi parameter pantulan minimum (Rmin)
dan penuh-lebar-pada-separuh-maksimum (FWHM). Keputusan kajian yang diperoleh
daripada kaedah Taguchi menunjukkan bahawa parameter yang
dioptimumkan untuk Rmin adalah panjang gelombang (785 nm),
Cr (1 nm), Ag (40 nm) dan ITO (20 nm). Manakala parameter yang
dioptimumkan untuk FWHM adalah panjang gelombang (785 nm),
Cr (0 nm), Ag (40 nm) dan ITO (0 nm). Dengan ini parameter
optimum untuk mencapai prestasi sensor yang diingini berjaya
diramal menggunakan kaedah pengoptimuman Taguchi.
Kata kunci: Indium timah oksida; kaedah Taguchi; perak; resonans
plasmon permukaan; tatarajah Kretschmann
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*Corresponding author;
email: susi@ukm.edu.my