Sains Malaysiana 41(7)(2012): 879–884

Effects of Inter-electrode Gap and Discharge Voltage on EUV Emission

from Stainless Steel Vacuum Spark Plasma

(Kesan Ruangan Antara-Elektrod Dan Voltan Nyahcas Terhadap PancaranEUV

daripada Plasma Percikan Vakum Keluli Tahan Karat)

S. Saboohi, S. L. Yap, L. S. Chan & C. S. Wong*

Plasma Technology Research Centre, Department of Physics, Faculty of Science,

University of Malaya, 50603 Kuala Lumpur, Malaysia

Received: 21 October 2011 / Accepted: 3 February 2012

ABSTRACT

The emission of Extreme Ultra Violet (EUV) from plasma produced by vacuum spark discharge using stainless steel as anode material was investigated. The operating pressure for all the experiments carried out was maintained at below 10-4 mbar. The discharge voltage tested was from 8 kV to 20 kV. The inter-electrode distance suitable for high intensity and reproducible EUV emissions was found to be in the range of 2.6 mm to 4.6 mm. The output EUV energy scaled as ~ V02, where V0 is the discharge voltage.

Keywords: Extreme Ultra Violet (EUV); vacuum spark

ABSTRAK

Pancaran Ultra Violet Lampau (EUV) yang dihasilkan oleh plasma daripada percikan pelepasan vakum yang menggunakan anod yang diperbuat daripada keluli tahan karat telah dikaji. Tekanan operasi untuk kesemua eksperimen dikekalkan di bawah 10-4 mbar. Voltan nyahcas diubah daripada 8 kV hingga 20kV. Jarak elektrod yang sesuai untuk pancaran EUV yang tinggi lalah antara 2.6 mm dan 4.6 mm . Tenaga EUV yang dihasilkan ditunjukkan dalam skala ~ V02 dengan V0 ialah voltan nyahcas.

Kata kunci: Ultraviolet lampau; vakum percikan

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*Corresponding author; email: cswong@um.edu.my