Sains Malaysiana 47(10)(2018):
2565–2571
http://dx.doi.org/10.17576/jsm-2018-4710-33
Pengoptimuman Sensor Resonans Plasmon Permukaan berdasarkan Kretschmann dengan Kaedah Taguchi
(Optimization of Kretschmann based on Surface Plasmon Resonance Sensor using
Taguchi Method)
GAN SIEW
MEI,
NAJMIAH
RADIAH
BINTI MOHAMAD, NUR AKMAR
BINTI JAMIL, BURHANUDDIN YEOP
MAJLIS
& P. SUSTHITHA MENON*
Institute
of Microengineering and Nanoelectronics
(IMEN), Universiti Kebangsaan
Malaysia, 43600 UKM Bangi, Selangor
Darul Ehsan, Malaysia
Diserahkan: 31 Mac 2018/Diterima: 27 Jun 2018
ABSTRACT
In this paper, Taguchi
experimental design technique was applied for optimization of
chromium (Cr)/silver (Ag)/indium tin oxide (ITO) SPR sensor
for operation in near infrared region. Four factors were considered
which include wavelength, thickness of Cr, thickness of Ag,
and thickness of ITO.
Finite-difference-time-domain (FDTD) method was used in numerical
analysis for minimum reflectance (Rmin)
and full-width-at-half-maximum (FWHM) performance parameters.
The results obtained from the Taguchi method shows that the
optimized parameter for Rmin was
785 nm of wavelength, Cr (1 nm), Ag (40 nm) and ITO (20
nm), whereas the optimized parameter for FWHM was 785 of wavelength, Cr
(0 nm), Ag (40 nm) and ITO (0 nm). In short, the optimum parameters
for achieving the desired performance of sensor were successfully
predicted using Taguchi optimization method.
Keywords: Indium tin
oxide; Kretschmann configuration;
silver; surface plasmon resonance; Taguchi method
ABSTRAK
Dalam makalah ini,
teknik reka bentuk
uji kaji
Taguchi telah digunakan untuk mengoptimumkan sensor SPR
kromium (Cr)/perak (Ag)/indium timah oksida (ITO)
untuk operasi berhampiran
gelombang inframerah. Empat faktor yang dipilih
termasuk panjang
gelombang, ketebalan Cr, ketebalan Ag dan ketebalan ITO. Kaedah perbezaan-terhingga-domain-masa (FDTD)
digunakan untuk
analisis berangka prestasi parameter pantulan minimum
(Rmin) dan
penuh-lebar-pada-separuh-maksimum
(FWHM).
Keputusan
kajian yang diperoleh daripada kaedah Taguchi menunjukkan bahawa parameter yang
dioptimumkan untuk
Rmin adalah
panjang gelombang
(785 nm), Cr (1 nm), Ag (40 nm) dan
ITO (20
nm). Manakala parameter yang dioptimumkan untuk FWHM adalah
panjang gelombang (785 nm), Cr (0
nm), Ag (40 nm) dan ITO (0
nm). Dengan ini parameter optimum untuk mencapai prestasi sensor yang diingini berjaya diramal menggunakan kaedah pengoptimuman Taguchi.
Kata kunci: Indium timah
oksida; kaedah
Taguchi; perak; resonans plasmon permukaan; tatarajah Kretschmann
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*Pengarang
untuk surat-menyurat;
email: susi@ukm.edu.my